Ferroelectric La?Doped ZrO <sub>2</sub> /Hf <sub> <i>x</i> </sub> Zr <sub> 1? <i>x</i> </sub> O <sub>2</sub> Bilayer Stacks with Enhanced Endurance

نویسندگان

چکیده

Hafnium zirconate (HZO) is investigated in metal–ferroelectric–metal capacitors as a function of Hf/(Hf+Zr) atomic ratio, the presence thin ZrO2 seed layer, and/or by doping HZO with La3+. It demonstrated that longer endurance achieved Hf-rich introducing layer. The further improved La3+ layer bilayer stack, which offers higher 2Pr pristine state compared stoichiometric doped same amount Both underlayer and are shown to play decisive role promoting formation an orthorhombic tetragonal phase at expense detrimental monoclinic phase.

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ژورنال

عنوان ژورنال: Physica Status Solidi (rrl)

سال: 2021

ISSN: ['1862-6254', '1862-6270']

DOI: https://doi.org/10.1002/pssr.202100033